Zeiss
Ultra-55
The Zeiss Ultra-55 is a lithography-category tool. The Zeiss Ultra-55 has a wafer size of 300mm. The Zeiss Ultra-55 is a field emission scanning electron microscope platform used with Zyvex S-100 Nanoprobes.[1][2][3]
Wafer size
300mm
Performance
Five nanometers[3]
How it works
The Zeiss Ultra-55 operates under vacuum during imaging or with the beam blanked. The installed nanoprobes operate under vacuum during imaging or with the beam blanked.[1]
What do the numbers mean?
Vacuum & pumping2
- Operating condition
- Operate under vacuum during imaging or with the beam blanked[3]2 sources
Wafer handling1
Performance1
Configuration & options6
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer size does the Zeiss Ultra-55 support?
The Zeiss Ultra-55 supports 300 mm wafers.[1]
What is the placement precision of the Zeiss Ultra-55?
The placement precision is five nanometers.[1]
How many nanoprobes are installed on the Zeiss Ultra-55?
The system includes three individually controlled nanoprobes.[1]
What is the minimum tip radius of the nanoprobes?
The minimum tip radius is fifty nanometers.[1]
Does the Zeiss Ultra-55 require vacuum for operation?
The Zeiss Ultra-55 operates under vacuum during imaging or with the beam blanked.[1][2]
What is the instrument type of the Zeiss Ultra-55?
The instrument type is a field emission scanning electron microscope (FESEM).[1]
Not publicly documented
The following facts about the Ultra-55 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Ultra-55 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Ultra-55 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Ultra-55 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Ultra-55 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Ultra-55 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]fazeltafti.com — fazeltafti.comfazeltafti.com
- [3]cnf.cornell.edu — cnf.cornell.educnf.cornell.edu
Last updated Oct 6, 2026.
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