Thermo Fisher
Scientific FEI Helios NanoLab 600 FIB
The Thermo Fisher Scientific FEI Helios NanoLab 600 FIB is a dual-beam focused ion beam instrument. The Thermo Fisher Scientific FEI Helios NanoLab 600 FIB uses a Schottky field emitter and a liquid gallium ion emitter. The Thermo Fisher Scientific FEI Helios NanoLab 600 FIB has a 5-axis motorized X-Y-Z-rotate-tilt stage.[1][2]
Power
350 V to 30 kV (Continuously adjustable)[1]
Vacuum
Vacuum system:[1]
Performance
Repeatability:[1]
Optics
100 nm (Minimum)[1]
What it is
The Thermo Fisher Scientific FEI Helios NanoLab 600 is a dual-beam focused ion beam and scanning electron microscope (FIB-SEM).[1][4]
How it works
The Helios NanoLab 600 uses a Schottky field emitter for the electron column and a gallium liquid metal ion source for the ion column.[1][4]
The electron optics include a magnetic immersion lens, and the ion optics are based on a Sidewinder field emission focused ion beam column.[1]
The sample stage is a five-axis motorized X-Y-Z-rotate-tilt stage with a travel of 150 mm in X and Y and 10 mm in Z.[1][2]
The vacuum system uses an Edwards XDS10 scroll pump and achieves a high vacuum of 10^-10 mbar.[1][2]
Detection is provided by an in-lens secondary and backscattered electron detector, an Everhart-Thornley SE detector, and a retractable STEM detector.[1][4]
Applications
The Helios NanoLab 600 is used for metrology and inspection tasks that benefit from combined ion-beam and electron-beam capability, such as site-specific cross-sectioning and nanoscale analysis.[4]
What do the numbers mean?
Power & electrical4
Vacuum & pumping5
Optics & imaging26
- Electron optics:[1]
- Magnetic immersion lens[1]
- Resolution:[1]
- Detectors
- In-lens SE and BSE True Lens Detector (TLD); Everhart-Thornely SE Detector (ETD); 14-Segments solid state STEM II detector; Chamber viewing IR CCD camera[1]
- Controller
- Microscope controller; LCD Monitor, 19"; Screen resolution 1280x1024; Optical mouse; Chamber door mounted interface for manipulators[1]
- Detectors
- In-lens SE and BSE True Lens Detector (TLD); Everhart-Thornley SE Detector (ETD); 14-segments solid state STEM II detector; chamber viewing IR CCD camera[1]
- Controller
- Microscope controller; LCD monitor, 19 in; screen resolution 1280x1024; optical mouse; chamber door mounted interface for manipulators[1]
Performance2
- Repeatability:[1]
Control & software1
Configuration & options34
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationVacuum system:[1]
- ConfigurationEdwards XDS10 Scroll pump[1]
- High vacuum10^-10 mbar[1]
- Accelerating voltage350 V to 30 kV (Continuously adjustable)[1]
- Vacuum systemEdwards XDS10 Scroll pump[1]
- Electron accelerating voltage350 V to 30 kV (Continuously adjustable)[1]
- Ion accelerating voltage0.5 kV to 30 kV (Continuously adjustable)[1]
- Accelerating voltage0.5 kV to 30 kV (Continuously adjustable)[1]
- Vacuum pumpEdwards XDS10 scroll pump[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of instrument is the Helios NanoLab 600?
The Thermo Fisher Scientific FEI Helios NanoLab 600 is a focused ion beam and scanning electron microscope (FIB-SEM).[4]
What beam columns are included?
The Helios NanoLab 600 includes an electron column and an ion column.[4]
What are the electron and ion source types?
The electron column uses a Schottky field emitter and the ion column uses a liquid gallium ion emitter.[2]
What is the stage travel?
The stage has a travel of 150 mm in X and Y and 10 mm in Z.[2]
What vacuum level does the system achieve?
The system achieves a high vacuum of 10^-10 mbar.[2]
Not publicly documented
The following facts about the Scientific FEI Helios NanoLab 600 FIB are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Scientific FEI Helios NanoLab 600 FIB are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Scientific FEI Helios NanoLab 600 FIB are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Scientific FEI Helios NanoLab 600 FIB are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Scientific FEI Helios NanoLab 600 FIB are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Scientific FEI Helios NanoLab 600 FIB is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Inventory photo
- [4]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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