Axcelis
NV 10 160 Ion
The Axcelis NV 10 160 is an ion implanter designed for 3 to 6 inch wafers. The Axcelis NV 10 160 delivers a maximum implant energy of 160 keV and a beam current range of 0.5–8 mA.[1]
What is it?
What do the numbers mean?
Vacuum & pumping2
Wafer handling2
Gas & chemistry1
Control & software1
Configuration & options4
Observed configurations
How individual machines were equipped when they appeared on the secondary market — as listed, per unit. These describe one specific machine, not the model in general.
Unit as listed[1]
- End Station: Manual Load
- Automatic Wafer Handling: No AT4
- Source: Standard
- Gas Box: 4 ELB Strings
- Vacuum: Dry Pump + Diffusion Pump
- Control System: Standard Console
- Includes standard source/gas box
- Includes manual load end station
- Includes console
- Includes vacuum system
- Includes multiple wafer disks
- Includes spare parts
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the NV 10 160 Ion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NV 10 160 Ion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NV 10 160 Ion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NV 10 160 Ion are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NV 10 160 Ion are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NV 10 160 Ion is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Sep 24, 2026.
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