Comparison ledger
Applied Materials 0010-14300 Magnet Assy, Axcelis NV 10 160 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-14300 Magnet AssyApplied Materials | NV 10 160 IonAxcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | Multiple wafer disks |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-14300 Magnet Assy | Axcelis NV 10 160 Ion |
| Specifications | ||
| Configuration | P4 Magnet Assy, IMP[1] | — |
| Gearbox P/N | 0010-27417[1] | — |
| Part Number | 0010-14300[1] | — |
| Description | P4 Magnet Assy, IMP[1] | — |
| Max. Implant Energy | — | 160 keV[2] |
| Beam Current Range | — | 0.5-8 mA[2] |
| End Station | — | Manual Load[2] |
| Automatic Wafer Handling | — | No AT4[2] |
| Source | — | Standard[2] |
| Gas Box | — | 4 ELB Strings[2] |
| Vacuum | — | Dry Pump + Diffusion Pump[2] |
| Control System | — | Standard Console[2] |
| Wafer size | — | Multiple wafer disks[2] |
| Vacuum System | — | Dry Pump + Diffusion Pump[2] |
Plan your fab
Building a Ion Implantation process? Get a complete equipment list.
Open the fab equipment planner →