Axcelis
200 PCU
How it works
The irradiator in the Axcelis Fusion 200 PCU contains a high-intensity mercury lamp and 2.45 GHz magnetrons for generating ultraviolet radiation. A pneumatic-controlled uplift mechanism moves the irradiator. The system is controlled by a microprocessor and includes a SECS interface for communication.[3][1]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- One source states the system was not currently operational due to robot parameters needing re-teaching.
What do the numbers mean?
Power & electrical3
Configuration & options1
Vintage & configurations
- 2000-06-01Vintage[1]
Source lists vintage 01.06.2000.
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of operation does the Fusion 200 PCU use?
The system supports cassette-to-cassette operation.[3]
What kind of UV source does the irradiator contain?
The irradiator contains a high-intensity mercury lamp and 2.45 GHz magnetrons for UV radiation generation.[3]
Does the system have a SECS interface?
Yes, the system includes a SECS software interface for communication with the fab host.[3]
Not publicly documented
The following facts about the 200 PCU are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
The control-system platform and OS era of the 200 PCU are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 200 PCU is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 200 PCU are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 200 PCU are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No description of the 200 PCU is on record.
Answerable by: an engineer who operated it or an OEM application specialist
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]fabsurplus.com — fabsurplus.comfabsurplus.com
- [2]inventory listing
- [3]exapro.com — exapro.comexapro.com
- [4]Axcelis Axcelis Fusion 200 P Axcelis Fusion 200 Pcu Photostabilizer System Consisting Of: - Model: Fusion 200 Pcu - Max Wafer Size Capable: 200mm- Shielded Secs Cables- Uv Bake Pr . Product Category: Semiconductor, Sub Category: Semiconductor - Misc Refurbished — yorkscientific.comyorkscientific.com
Last updated Oct 9, 2026.
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