Waferpedia

Tokyo Electron

Precio Octo

Test & ProbeTokyo Electron Precio family
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The Precio Octo is a fully automatic wafer prober from Tokyo Electron. The Precio Octo handles wafer sizes from 4 to 8 inches, with specific configurations supporting 4", 5", 6", and 8" wafers. The Precio Octo can be integrated with TELPADS-O for high-speed automated probe mark inspection.[1][2][3][4]

Precio Octo — Inventory photo
Fig. 01Precio OctoInventory photo[1]

How it works

The TELPADS-O function is an automated probe mark inspection system that uses a high-speed engine to inspect all pads and all wafers, produce quantitative quality-control data for probe marks, and reduce operator interaction by eliminating manual microscope inspection.[4]

What do the numbers mean?

Power & electrical1

50/60 Hz[1]
Accurate?

Wafer handling8

8" gold hot & cold chuck top system[5]
Accurate?
Right side single top loader[5]
Accurate?
Special configuration for 4-5" wafers[2]
Accurate?
Wafer Size
4", 5", 8"[1]
Accurate?
Wafer Size
4", 5"[2]
Accurate?
Wafer Size
4", 5", 6", 8"[3]
Accurate?
Chuck Type
Gold hot & cold chuck top system[5]
Accurate?
Loader Type
Right side single top loader[5]
Accurate?

Control & software2

GPIB Interface[5]
Accurate?
Interface
GPIB[5]
Accurate?

Configuration & options9

CPU
VIP3A[5]
Accurate?
Chiller
C255 (-55 ~ 200 degrees C)[5]
Accurate?
WAP[5]
Accurate?
Ambient - Hot Temperature range[3]
Accurate?
Chiller Model
C255[5]
Accurate?
Temperature Range
-55 to 200 degrees C[5]
Accurate?
Vintage (unit)
2022[1]
Accurate?
Vintage (unit)
2011[5]
Accurate?
Probe Mark Inspection
Supports TELPADS-O high-speed PMI[4]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Precio Octo, 4-5 inch special configuration——Special configuration for 4-5 inch wafers.Equipment inventory listing[2]
Precio Octo, ambient-hot temperature range configuration——Configured for 4 to 8 inch wafers with ambient-hot temperature range.Equipment inventory listing[3]
Precio Octo, 8-inch gold hot & cold chuck top system——Includes CPU VIP3A, chiller C255, right side single top loader, and GPIB interface.Equipment inventory listing[5]
Precio Octo—2011Special configuration for 4-5 inch wafers.Equipment inventory listing[2]
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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration50/60 Hz[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes does the Precio Octo support?

The Precio Octo supports wafer sizes of 4, 5, 6, and 8 inches.[1][5][2][3]

Who manufactures the Precio Octo?

Tokyo Electron (Tel) manufactures the Precio Octo.[1][5][2][3][4]

Not publicly documented

The following facts about the Precio Octo are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Precio Octo are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Precio Octo are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Precio Octo are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Precio Octo is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Precio Octo are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (7)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]inventory listing
  4. [4]web.archive.org — tel.com (Jan 14, 2011)web.archive.org
  5. [5]Inventory photo
  6. [6]Inventory photo
  7. [7]Inventory photo
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Last updated Sep 25, 2026.

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