Tokyo Electron
Act 8
What it is
What do the numbers mean?
Wafer handling1
Gas & chemistry7
- 3 Developers[1]
- Coaters & Developers Vintage
- 1999(inventory listing)
- Coaters & Developers Vintage
- 2000(inventory listing)
- Coaters & Developers Vintage
- 2020(inventory listing)
- Coaters & Developers Vintage
- 1998(inventory listing)
- Coaters & Developers Vintage
- 2006(inventory listing)
- Dual Block, 4 Load Port/1 Side Port, 4 Coaters, 3 Developers, 1 TCT, 14 PHP Hot Plates[1]
Configuration & options14
- Dual Block, 4 Load Port/1 Side Port[1]
- 4 Coaters[1]
- 1 TCT[1]
- 14 PHP Hot Plates[1]
- Single[4]
- Dual[5]
- 4C3D[6]
- Vintage
- 2006(inventory listing)
- Vintage
- 1999(inventory listing)
- Vintage
- 2000(inventory listing)
- Vintage
- 2020(inventory listing)
- Vintage
- 1998(inventory listing)
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Act 8 Coater / Developer - Dual Block, 4 Load Port/1 Side Port - 4 Coaters - 3 Developers - 1 TCT - 14 PHP Hot Plates | — | 2006 | Listed with dual-block configuration and the specified port, coater, developer, TCT, and hot-plate counts; described as 2006 vintage. | Equipment inventory listing[1] |
| Act 8 Coater / Developer, 8" - Single | — | 2014 | Listed as single configuration; described as 2014 vintage. | Equipment inventory listing[4] |
| Act 8 Coater / Developer, 8" | — | 2000–2001 | Listed as 2000, 2001 vintage. | Equipment inventory listing[8] |
| Tel Act 8 Coater / Developer, 8" - Single | — | 2014 | Described as a single vintage 2014 configuration. | Equipment inventory listing[4] |
| Tel Act 8 Coater / Developer - Dual Block, 4 Load Port/1 Side Port - 4 Coaters - 3 Developers - 1 TCT - 14 PHP Hot Plates | — | 2006 | Described with a dual-block configuration and the listed ports, coater/developer count, TCT, and hot plates; vintage 2006. | Equipment inventory listing[1] |
| Tel Act 8 Coater / Developer, 8" | — | 2000–2001 | Described as vintage 2000, 2001. | Equipment inventory listing[8] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Act 8 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Act 8 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Act 8 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Act 8 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Act 8 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Act 8 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (12)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]inventory listing
- [5]inventory listing
- [6]inventory listing
- [7]Equipment inventory listing
- [8]Equipment inventory listing
- [9]Equipment inventory listing
- [10]Equipment inventory listing
- [11]Photolithography ‒ Center of MicroNanoTechnology CMi ‐ EPFL — epfl.chepfl.ch
- [12]Tokyo Electron | Products SOD Coater-Ectus- — tel.com (Apr 14, 2005)web.archive.org
Last updated Oct 7, 2026.
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