Comparison ledger
EV Group 120 Automated Coater Processing, Tokyo Electron Act 8, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 120 Automated Coater ProcessingEV Group | Act 8Tokyo Electron |
|---|---|---|
| OEM | EV Group | Tokyo Electron |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 120 Automated Coater Processing | Tokyo Electron Act |
| Cited variants | — |
|
| Specifications | ||
| Configuration | 50/60 Hz[4] | Dual Block, 4 Load Port/1 Side Port[1] |
| Phase | 3 Phase[4] | — |
| Wafer sizes | 6 inch, 8 inch[4] | — |
| Frequency | 50/60 Hz[4] | — |
| Wiring configuration | 4 Wire + GND[4] | — |
| Vintage | 2015[4] | 2006 |
| Coaters & Developers Vintage | — | 1999 |
| Wafer Size | — | 8 inch[7] |
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