Thermo Fisher
Scientific FEI Quanta 3D Dual Beam FEG-FIB-SEM
The Thermo Fisher Scientific / FEI Quanta 3D Dual Beam FEG-FIB-SEM is a field emission gun focused ion beam scanning electron microscope. The Thermo Fisher Scientific / FEI Quanta 3D Dual Beam FEG-FIB-SEM is categorized as Metrology & Inspection. The Thermo Fisher Scientific / FEI Quanta 3D Dual Beam FEG-FIB-SEM has a maximum beam current of 65 nA at 30 kV.[1][2]
What it is
The Thermo Fisher Scientific FEI Quanta 3D Dual Beam FEG-FIB-SEM is a field emission gun focused ion beam scanning electron microscope.[1][2]
The Thermo Fisher Scientific FEI Quanta 3D Dual Beam FEG-FIB-SEM is used for metrology and inspection.[2]
How it works
General reference — not yet source-verifiedA dual beam FIB-SEM combines a focused ion beam column with a scanning electron microscope column in one instrument.
The focused ion beam is used to mill or modify small regions of a sample, and the electron beam is used to image the same area at high resolution.
Where it fits in the process flow
General reference — not yet source-verifiedThe Thermo Fisher Scientific FEI Quanta 3D Dual Beam FEG-FIB-SEM sits in the metrology and failure-analysis portion of semiconductor and materials workflows.
The instrument is used after fabrication steps when a small area must be examined, sectioned, or prepared for closer inspection.
Applications
General reference — not yet source-verifiedThe Thermo Fisher Scientific FEI Quanta 3D Dual Beam FEG-FIB-SEM is used for local imaging, sample cross-sectioning, and inspection of small features.
A dual beam FIB-SEM is commonly used for defect analysis, process troubleshooting, and site-specific sample preparation.
What do the numbers mean?
Control & software1
Configuration & options6
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Scientific FEI Quanta 3D Dual Beam FEG-FIB-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Scientific FEI Quanta 3D Dual Beam FEG-FIB-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Scientific FEI Quanta 3D Dual Beam FEG-FIB-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Scientific FEI Quanta 3D Dual Beam FEG-FIB-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Scientific FEI Quanta 3D Dual Beam FEG-FIB-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Scientific FEI Quanta 3D Dual Beam FEG-FIB-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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