Comparison ledger
KLA .496 PSL Wafer, Thermo Fisher Scientific FEI Quanta 3D Dual Beam FEG-FIB-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Quanta 3D Dual Beam FEG-FIB-SEMThermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Thermo Fisher Scientific FEI Quanta |
| Specifications | ||
| Configuration | NIST Traceable[1] | Unit has GIS, both Pt and C[3] |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| Tool type | — | Field emission gun focused ion beam scanning electron microscope[4] |
| Control software | — | xT v3.6.13.45 running on WinXP[3] |
| Max beam current | — | 65 nA at 30 kV[3] |
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