SUSS MicroTec
MA1006
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The SUSS MicroTec MA1006 is a manual mask aligner for top and bottom side alignment. The MA1006 offers exposure programmes for proximity, soft, hard and vacuum contact, and is suitable for wafers up to 150mm diameter. The Karl Suss MA1006 achieves 1 micron resolution on 6-inch wafers.[1][2]
How it works
The MA1006 supports several exposure modes including proximity, soft contact, hard contact, vacuum contact, and bond mode. In proximity mode, the wafer and mask are separated by a gap adjustable in 1 μm steps. In soft contact, a low contact pressure is applied during exposure. In hard contact, nitrogen pressure beneath the wafer presses it against the mask. In vacuum contact, the space between wafer and mask is evacuated to achieve intimate contact. The exposure lamp can be 350 W, 500 W, or 1000 W, providing UV light in the UV400 or UV300 spectral ranges. The illumination uniformity over a 6-inch wafer is typically ±5%.[1]
What do the numbers mean?
Vacuum & pumping4
Wafer handling3
Gas & chemistry1
Optics & imaging2
Performance1
Dimensions & facilities3
Configuration & options3
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| MA1006 TSA | — | — | Top Side Alignment variant | nanofab.utah.edu[5] |
| MA1006 TSAIBSA | — | — | Top and Bottom Side Alignment variant | nanofab.utah.edu[5] |
| MA1006 TSAII R | — | — | Variant designation as stated in manual | nanofab.utah.edu[5] |
| MA1006 TSA / BSA | — | — | Top and bottom side alignment configuration | nanofab.utah.edu[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the maximum wafer diameter the MA1006 can handle?
The MA1006 can process wafers up to 150 mm in diameter.[1]
What exposure modes does the MA1006 support?
The MA1006 supports proximity, soft contact, hard contact, vacuum contact, and bond mode.[5][1]
What lamp power options are available for the MA1006?
The MA1006 can be equipped with 350 W, 500 W, or 1000 W exposure lamps.[1]
How is alignment carried out on the MA1006?
Alignment is performed using micrometer screws for X, Y, and theta directions. For top-side alignment, a splitfield microscope is used; for bottom-side alignment, a CCD camera and digital image storage system are employed.[5]
What is the typical illumination uniformity of the MA1006 over a 6-inch wafer?
The illumination uniformity over a 6-inch wafer is typically ±5%.[1]
What minimum linewidth has been measured on the MA1006?
With Shipley 1813 photoresist under a defined process (2000 rpm spin, 110 °C bake, 30 mJ/cm² exposure, AZ 1:1 develop), the measured minimum linewidth at full photoresist height is 2 μm.[4]
Not publicly documented
The following facts about the MA1006 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MA1006 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the MA1006 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MA1006 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MA1006 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the MA1006 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
- [2]jmind.com — jmind.comjmind.com
- [3]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
- [4]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
- [5]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
Last updated Oct 11, 2026.
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