Rigaku
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The Rigaku 3640 Wafer Disk Analyzer is a wafer and disk analyzer. The Rigaku 3640 Wafer Disk Analyzer was developed as an advanced model capable of handling next-generation memory. The Rigaku 3640 Wafer Disk Analyzer has a sample chamber for 8 inch maximum samples.[1]
The Rigaku 3640 uses an XYθ sample stage that permits XY motion while keeping the wafer direction fixed. The model also uses a spin mechanism for center measurement, a dry pump, an automatic pressure controller, and an X-ray tube with a rhodium target and a three kilowatt generator.[1]
The Rigaku 3640 includes a cassette-to-cassette handling option and orientation flat or notch adjustment. The analyzer also supports simultaneous analysis of multiple elements, fixed goniometers for each element, and a scanning goniometer for titanium through uranium.[1]
The Rigaku 3640 is suited to production and development environments that require wafer-level analysis, including cassette-to-cassette handling and online or offline analysis functions. The model also includes software for multilayer thin-film analysis and wafer measuring direction setting.[1]
The Rigaku 3640 is applicable to ferroelectric memory, DRAM, surface acoustic wave devices, memory disks, and magnetic heads. The model is also used for thin-film analysis on materials such as BPSG, PSG, polysilicon, silicon dioxide, silicon nitride, tungsten silicide, aluminum copper alloys, titanium nitride, titanium tungsten, strontium titanate, and tantalum oxide.[1]
The Rigaku 3640 supports analysis of materials associated with ferroelectric memories, including Y1, PZT, BST, and platinum. The model also covers materials used in memory disk and magnetic head applications, including Co-Ni-Cr, Ni-P, Fe-Tb-Co, Fe-Ni, and CoNbZr.[1]
The Rigaku Wafer/Disk Analyzer series debuted in 1977.
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The following facts about the 3640 Wafer Disk Analyzer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the 3640 Wafer Disk Analyzer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 3640 Wafer Disk Analyzer are not on record.
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Last updated Oct 6, 2026.
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