Plasma-Therm
SLR 770 ICP Deep Silicon
Plate 01Plasmatherm SLR-770 DRIE Bosch Process
ClassOneVideosWatch on YouTubePlate 02Plasma-Therm SLR770 ICP Etcher Demonstration - System Overview - Part 1
Gregory WrightWatch on YouTubePlate 03Plasma-Therm SLR770 ICP Etcher Demonstration - Part 1
Gregory WrightWatch on YouTubePlate 04Plasma-Therm SLR770 ICP Etcher Demonstration - Part 2
Gregory WrightWatch on YouTubePlate 05Plasma-Therm SLR770 ICP Etcher Demonstration - Part 3
Gregory WrightWatch on YouTube
How it works
The SLR 770 employs a single chamber with a load-lock shuttle-lock transfer for wafer handling. The system is configured with a gas box containing four Horiba SEC-E40 mass-flow controllers for process gases, and an adaptive pressure controller (VAT PM-5) for chamber pressure regulation. RF power is supplied by RF Power Products generators (RFPP I22050001 & I20050007 for ICP, and RFPP RF5S & AM-5 for bias). Pumping is provided by a Leybold MAG 2000 turbomolecular pump with a Leybold MD 2000 backing pump, and temperature control is handled by a Neslab HX300 chiller.[2][1]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- One analog I/O box is not working.
What do the numbers mean?
Power & electrical8
Vacuum & pumping7
- Turbo Pump & Controller:[1]
Wafer handling4
- Load lock shuttle lock transfer[1]
Gas & chemistry6
- Gas Box:[1]
Control & software4
Configuration & options15
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationGas Box:[1]
- Process GasO2, Ar, SF6, C4F6[1]
- ConfigurationController & RF Generator:[1]
- ConfigurationRF Power Products RFPP I22050001 & I20050007 Adaptive Pressure Controller[1]
- ConfigurationRF Generator:[1]
- ConfigurationRF Power Products RFPP RF5S & AM-5[1]
- ConfigurationTurbo Pump & Controller:[1]
- Gas boxHoriba SEC-E40 (4)[1]
- Process gasesO2, Ar, SF6, C4F6[1]
- Controller and RF generatorRF Power Products RFPP I22050001 & I20050007[1]
- Adaptive pressure controllerVAT PM-5[1]
- RF generatorRF Power Products RFPP RF5S & AM-5[1]
- Turbo pump and controllerLeybold MAG 2000; Leybold MD 2000[1]
- Power1.0 kW ICP RF package; 2 kW generator limited to 1.0 kW; 500 W RF bias[3]
- Gas box lines5 lines[3]
- Additional process gasesCHF3, C4F8, SF6, Ar, O2[3]
- Dry pumpEdwards ih80[3]
- Load lock dry pumpEdwards nxds[3]
- Load lock turbo pumpLeybold[3]
- Turbo pumpEdwards STPA-1303CV[3]
- Electrical380VAC 3 phase[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the SLR 770 ICP Deep Silicon are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SLR 770 ICP Deep Silicon are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SLR 770 ICP Deep Silicon are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SLR 770 ICP Deep Silicon are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the SLR 770 ICP Deep Silicon is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SLR 770 ICP Deep Silicon are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]fabsurplus.comfabsurplus.com
Last updated Oct 4, 2026.
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