MKS

631F

Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

MKS631F

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Vacuum

1 to 1000 Torr (1.33×10² to 1.33×10⁵ Pa)^[1]

Performance

0.50% of Reading^[1]

What is it?

The MKS 631F is a heated absolute pressure transducer that uses capacitance manometer technology. It provides accurate pressure measurement from 1 to 1000 Torr (1.33×10² to 1.33×10⁵ Pa) with 0.50% accuracy of reading. The sensor is internally heated to either 150°C or 200°C. Applications include LPVCD and freeze drying.

What can it run?

Process applications and technology nodes documented for this tool.

LPVCD
freeze drying

What do the numbers mean?

Vacuum & pumping1

Full Scale Range: 1 to 1000 Torr (1.33×10² to 1.33×10⁵ Pa)^[1]

Performance1

Accuracy: 0.50% of Reading^[1]

Configuration & options1

Temperature (Internal Heating): 150°C, 200°C^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Full Scale Range1 to 1000 Torr (1.33×10² to 1.33×10⁵ Pa)^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the full scale pressure range of the MKS 631F?

The full scale range is 1 to 1000 Torr.^[1]

What internal heating temperatures are available for the 631F?

The transducer can be internally heated to either 150°C or 200°C.^[1]

Not publicly documented

The following facts about the 631F are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 631F are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 631F are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 631F are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 631F are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 631F is not on record.
Answerable by: an OEM datasheet or a fab qualification report