Comparison ledger
Applied Materials 0010-21246 Part, MKS 631F, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-21246 PartApplied Materials | 631FMKS |
|---|---|---|
| OEM | Applied Materials | MKS |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | MKS 631F |
| Specifications | ||
| Full Scale Range | — | 1 to 1000 Torr (1.33×10² to 1.33×10⁵ Pa)[1] |
| Accuracy | — | 0.50% of Reading[1] |
| Temperature (Internal Heating) | — | 150°C, 200°C[1] |