Laurell
H6-15 B
The Laurell H6-15 B is a spin coater in the 650-series. The Laurell H6-15 B supports a maximum substrate size of 300mm (9" x 9"). The Laurell H6-15 B has a maximum speed of 12000 rpm.[1]
What it is
General reference — not yet source-verifiedA spin coater is a resist-processing tool used to dispense a liquid film onto a substrate and then rotate the substrate to spread that film into a thin, uniform layer.
How it works
The H6-15 B supports Tabletop, In-Deck, and On-deck mounting options.[1]
Where it fits in the process flow
General reference — not yet source-verifiedA spin coater sits at the coating step of resist processing before subsequent exposure and development operations.
Applications
General reference — not yet source-verifiedSpin coaters are used for applying photoresist and other liquid thin films to substrates in semiconductor and related microfabrication work.
What do the numbers mean?
Wafer handling1
Control & software1
Configuration & options4
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the H6-15 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the H6-15 B are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the H6-15 B are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the H6-15 B are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the H6-15 B are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the H6-15 B is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]images.laurell.com — images.laurell.comimages.laurell.com
Last updated Oct 7, 2026.
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