Lam Research
A 6 Exelan HPT
Lam Research A 6 Exelan HPT is a semiconductor etching tool for 8-inch wafers. Lam Research A 6 Exelan HPT includes two Exelan HPT chambers and a 4520 chamber. Lam Research A 6 Exelan HPT was manufactured in 1997.[1]
What it is
How it works
Where it fits in the process flow
The A 6 Exelan HPT belongs to that etch stage when it is used for dielectric processing.[1]
What do the numbers mean?
Vacuum & pumping2
- TM Pump to Dual Pump (1 for Load Lock / 1 for TM)[2]
Wafer handling1
Gas & chemistry3
- To use 10 Gases, the Gas Box needs to be enhanced[2]
Configuration & options12
Vintage & configurations
- 1997manufactured[1]
The A 6 Exelan HPT was manufactured in 1997.
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationTM Pump to Dual Pump (1 for Load Lock / 1 for TM)[2]
- ConfigurationTo use 10 Gases, the Gas Box needs to be enhanced[2]
- Vacuum & pumping1 TM Pump to Dual Pump (1 for Load Lock / 1 for TM)[3]
- Gas & chemistryTo use 10 Gases, the Gas Box needs to be enhanced[3]
- Gas box noteTo use 10 gases, the Gas Box needs to be enhanced[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
How many chambers does the A 6 Exelan HPT include?
The system includes three chambers: two Exelan HPT chambers and one 4520 chamber.[2][3][1]
What is the pump configuration of the A 6 Exelan HPT?
The system uses a dual pump configuration with two TM pumps: one pump for the load lock and one for the transfer module.[2][3]
Not publicly documented
The following facts about the A 6 Exelan HPT are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the A 6 Exelan HPT are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the A 6 Exelan HPT are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the A 6 Exelan HPT are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the A 6 Exelan HPT is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the A 6 Exelan HPT are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]inventory listing
- [3]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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