Comparison ledger
Axcelis 200 ACU, Lam Research A 6 Exelan HPT, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | A 6 Exelan HPTLam Research |
|---|---|---|
| OEM | Axcelis | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1997 manufactured |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Lam Research A 6 Exelan HPT |
| Specifications | ||
| Configuration | Parts Machine[1] | 3 Chambers[5] |
| Manufacturer | Axcelis[1] | Lam Research[6] |
| Model | 200 ACU[1] | Alliance A 6 Exelan HPT Dielectric[6] |
| Tool type | Asher[1] | — |
| Wafer size | 200mm[3] | 8 inch (200 mm)[6] |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Category | — | Etch[6] |
| Chamber configuration | — | Exelan HPT chambers (2) and 4520 chamber[6] |
| Vacuum & pumping | — | 1 TM Pump to Dual Pump (1 for Load Lock / 1 for TM)[7] |
| Gas & chemistry | — | To use 10 Gases, the Gas Box needs to be enhanced[7] |
| Configuration & options | — | 3 Chambers[5] |
| Condition | — | Refurbished[5] |
| Last confirmed date | — | November 12, 2024[5] |
| Vintage year | — | 1997[6] |
| Gas box note | — | To use 10 gases, the Gas Box needs to be enhanced[5] |
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