KLA
Surfscan 6200
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
Where it fits in the process flow
The Surfscan 6200 is used on unpatterned wafers, so the tool evaluates surface condition before pattern-dependent inspection steps.[2]
Applications
The Surfscan 6200 is used for wafer surface contamination analysis on silicon wafers and other opaque, polished surfaces that scatter less than a small fraction of incident light.[2]
The Surfscan 6200 has been used in defect measurements on coatings deposited by planar magnetron sputtering and on Mo/Si multilayers and silicon films.[5]
What do the numbers mean?
Wafer handling3
Optics & imaging2
Performance2
Control & software1
Dimensions & facilities2
Configuration & options4
- Defect Sensitivity
- 0.10 µm diameter PSL sphere equivalent with greater than 90% capture rate[2]
Parts & consumables
Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.
- KLA Surfscan 6200 SBC UpgradeIn Productionsource[4]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What substrate sizes does the Surfscan 6200 handle?
The Surfscan 6200 handles 50 mm, 76 mm, 100 mm, 125 mm, 150 mm, and 200 mm wafers.[2]
What laser source does the Surfscan 6200 use?
The Surfscan 6200 uses a 30 mW argon-ion laser at 488 nm.[2][3]
What outputs does the Surfscan 6200 provide?
The Surfscan 6200 provides defect maps, histograms, haze maps, and magnified views of individual defects.[3][2]
What materials can the Surfscan 6200 inspect?
The Surfscan 6200 is specified for silicon wafers and for opaque, polished surfaces that scatter less than 5% of incident light.[2]
Not publicly documented
The following facts about the Surfscan 6200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan 6200 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan 6200 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Surfscan 6200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Surfscan 6200 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Surfscan 6200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]semistarcorp.com — semistarcorp.comsemistarcorp.com
- [3]classoneequipment.com — classoneequipment.comclassoneequipment.com
- [4]Equipment inventory listing
- [5]Defects in Coatings Deposited by Planar Magnetron Sputtering: Measurements with a Tencor Surfscan 6200 — doi.orgdoi.org
Last updated Sep 28, 2026.