Tool family
KLA Surfscan 6200
Models in this family
The KLA Surfscan 6200 is a wafer surface contamination analysis system and laser particle detector used for measuring defect densities on unpatterned wafers, with an argon-ion laser illumination at 488 nm and detection sensitivity down to 0.10 µm.
KLA Surfscan 6200 Refurbishment Services are offered for a client system refurbishment package that includes a solid state laser and several upgraded components.
All entries
- Surfscan 6200KLA
The KLA Surfscan 6200 is a wafer surface contamination analysis system and laser particle detector used for measuring defect densities on unpatterned wafers, with an argon-ion laser illumination at 488 nm and detection sensitivity down to 0.10 µm.
14 specs - Surfscan 6200 Particle DefectKLACategoryMetrology & Inspection1 spec
- Surfscan 6200 Refurbishment ServicesKLA
KLA Surfscan 6200 Refurbishment Services are offered for a client system refurbishment package that includes a solid state laser and several upgraded components.
10 specs