Headway
PWM30
The Headway PWM30 is a photoresist spin/bake hood. The Headway PWM30 has adjustable spin speeds from 50 to 10,000 RPM. The Headway PWM30 includes an LCD interface for user input prompts and process display.[1][2]
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What it is
How it works
The Headway PWM30 uses vacuum hold-down chucks for alternate substrate sizes and fail-safe vacuum interlocks to secure the workpiece during spinning.[1][2]
The Headway PWM30 is microprocessor controlled, supports up to nine steps in one recipe, stores up to ten user-designed recipes, and allows speed to be manually controlled while a recipe is running.[1][2]
Applications
The Headway PWM30 is used for photoresist coating on samples that fit the selected vacuum hold-down chuck.[1][2]
- Photoresist coating
What do the numbers mean?
Vacuum & pumping3
Gas & chemistry1
Control & software4
Configuration & options3
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What speed range does the Headway PWM30 support?
The Headway PWM30 supports adjustable spin speeds from 50 to 10,000 RPM.[1][2]
How many recipe steps can the Headway PWM30 support?
The Headway PWM30 supports up to nine steps in one recipe.[1][2]
Not publicly documented
The following facts about the PWM30 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PWM30 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PWM30 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PWM30 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PWM30 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PWM30 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]nanocenter.umd.edu — nanocenter.umd.edunanocenter.umd.edu
- [2]https://www.nanocenter.umd.edu/equipment/fablab/sops/photo-09/Photo-09%20-%20SOP%20-%20Photoresist%20Spin%20Station.pdf — nanocenter.umd.edunanocenter.umd.edu
Last updated Oct 9, 2026.
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