Comparison ledger
CEE 1000 Hot Plate, Headway PWM30, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | PWM30Headway | |
|---|---|---|
| OEM | CEE | Headway |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 1000 Hot Plate | Headway PWM30 |
| Specifications | ||
| Configuration | 4"[1] | — |
| Type | Hot Plate[1] | Photoresist spin/bake hood[2] |
| Wafer Size | 4 inch[1] | — |
| Spin speed | — | 50-10,000 RPM[2] |
| Control | — | Microprocessor controlled[2] |
| Recipe steps | — | Supports up to nine steps in one recipe[2] |
| Recipe storage | — | Stores up to 10 user-designed recipes[2] |
| User interface | — | LCD interface for user input prompts and process display[2] |
| Substrate support | — | Vacuum hold down chucks for alternate substrate sizes[2] |
| Safety | — | Fail-safe vacuum interlocks[2] |
| Exhaust | — | Bowl exhaust[2] |
| Bowl | — | Removable bowl liners[2] |
| Braking | — | Automatic dynamic breaking[2] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →