Waferpedia

Disco

DGP 8761 DFM 2800 Back

DGP 8761 DFM 2800 Back — Inventory photo
Fig. 01DGP 8761 DFM 2800 BackInventory photo[1]

Wafer size

2 Independent loadports, 25 wafer front opening unified pod (FOUP) carrier

Power

200 VAC[1]

Vacuum

Pedestal style with vacuum[2]

What it is

The Disco DGP 8761 / DFM 2800 Back Grinder is a semiconductor wafer back grinding system.[1][3][2]

The Disco DGP 8761 / DFM 2800 Back Grinder is a Disco-manufactured system identified with the model designation DGP 8761 / DFM 2800.[1][3][2]

How it works

General reference — not yet source-verified

A back grinder reduces wafer thickness by removing material from the rear side of a wafer.

A back grinding tool typically uses a wafer holding stage, rotating grinding spindles or wheels, and handling hardware to position the wafer for backside material removal.

Where it fits in the process flow

General reference — not yet source-verified

A back grinder belongs in the wafer thinning flow after frontside device processing has advanced far enough to require backside material removal.

A back grinder commonly sits before downstream operations that benefit from a thinner wafer, such as singulation, die attach, or other assembly steps.

Applications

General reference — not yet source-verified

A back grinding system is used for wafer thinning in semiconductor manufacturing.

A back grinding system is used when backside preparation, thickness reduction, or post-grind surface conditioning is needed on wafers.

What do the numbers mean?

Power & electrical3

Voltage
200 VAC[1]
Accurate?
Phase
3 Phase[1]
Accurate?
Power
200 VAC, 3 Phase[1]
Accurate?

Vacuum & pumping4

Pedestal style with vacuum[2]
Accurate?
Porous Vacuum Chucks (4)[2]
Accurate?
Vacuum style
Pedestal style with vacuum[2]
Accurate?
Porous vacuum chucks
4[2]
Accurate?

Wafer handling15

Wafer size
2 Independent loadports, 25 wafer front opening unified pod (FOUP) carrier[2]
Accurate?
Wafer size
Wafer handling robot, 6 axis[2]
Accurate?
Wafer size
Wafer alignment system with capability for notch detection and precise alignment[2]
Accurate?
Wafer size
Wafer ID reader[2]
Accurate?
Chuck cleaning system[2]
Accurate?
Independent transfer arms (2) - to move wafers & form processing section[2]
Accurate?
Wafer size
Wafer Processing Hardware[2]
Accurate?
Wafer size
Wafer processing consumables[2]
Accurate?
Wafer size
12 inch[2]
Accurate?
Carrier
25 wafer front opening unified pod (FOUP) carrier[2]
Accurate?
Wafer handling robot
Wafer handling robot[2]
Accurate?
Wafer alignment system
Wafer alignment system with capability for notch detection and precise alignment[2]
Accurate?
Wafer ID reader
Included[2]
Accurate?
Chuck cleaning system
Included[2]
Accurate?
Independent transfer arms
2[2]
Accurate?

Configuration & options18

Full Load Current
72 A[1]
Accurate?
Independent wet grind spindles (2)[2]
Accurate?
Dry polish spindle[2]
Accurate?
Grind wheel (2)[2]
Accurate?
Polishing wheel[2]
Accurate?
Spin-dry station[2]
Accurate?
Tape-side wash for clean post grind[2]
Accurate?
HDD not included[2]
Accurate?
OEM
Disco[1]
Accurate?
Model
DGP 8761 / DFM 2800[1]
Accurate?
Equipment type
Back Grinder[1]
Accurate?
Loadports
2 independent loadports[2]
Accurate?
Wet grind spindles
2 independent wet grind spindles[2]
Accurate?
Dry polish spindle
Included[2]
Accurate?
Grind wheels
2[2]
Accurate?
Polishing wheel
Included[2]
Accurate?
Spin-dry station
Included[2]
Accurate?
Tape-side wash
For clean post grind[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage200 VAC[1]
  • Phase3 Phase[1]
  • ConfigurationPedestal style with vacuum[2]
  • ConfigurationPorous Vacuum Chucks (4)[2]
  • Vacuum stylePedestal style with vacuum[2]
  • Porous vacuum chucks4[2]
  • Power200 VAC, 3 Phase[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

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Frequently asked questions

What is the equipment model?

The equipment model is Disco DGP 8761 / DFM 2800 Back Grinder.[1][3][2]

What kind of tool is it?

The tool is a back grinder for semiconductor wafers.[1][3][2]

Not publicly documented

The following facts about the DGP 8761 DFM 2800 Back are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DGP 8761 DFM 2800 Back are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DGP 8761 DFM 2800 Back are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DGP 8761 DFM 2800 Back are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DGP 8761 DFM 2800 Back are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DGP 8761 DFM 2800 Back is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]inventory listing
  3. [3]Equipment inventory listing
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Last updated Sep 29, 2026.

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