Bruker

Rtespa 300

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Bruker Rtespa 300 is an AFM probe model. Bruker Rtespa 300 is an unmounted tapping-mode probe. Bruker Rtespa 300 has a nominal 300 kHz frequency and a nominal 40 N/m spring constant.^[1]^[2]

Rtespa 300 — Inventory photo — Fig. 01Rtespa 300Inventory photo^[3]

Power

300 kHz^[1]

Optics

8 nm^[1]

What it is

The Bruker Rtespa 300 is an AFM probe used in test and probe work. The Rtespa 300 is an unmounted tapping-mode probe with a rectangular cantilever, a rotated symmetric tip, and aluminum reflective coating on the backside of the cantilever.^[1]^[2]

How it works

The Rtespa 300 uses a rotated tip to provide a more symmetric representation of features over 200 nm. The probe includes a reflective aluminum backside coating to increase the laser signal used for cantilever readout.^[1]^[2]

Where it fits in the process flow

General reference — not yet source-verified

AFM probe work sits in metrology and failure-analysis flows where nanoscale surface shape and contrast need to be measured after processing. AFM probing is commonly used on completed or partially completed structures to inspect morphology without the class of tools making electrical contact to every structure.

What do the numbers mean?

Power & electrical2

Frequency, nominal: 300 kHz^[1]
Frequency range: 200 to 400 kHz^[1]

Optics & imaging2

Tip radius, nominal: 8 nm^[1]
Tip radius, max: 12 nm^[1]

Dimensions & facilities3

Width, nominal: 40 µm^[1]
Width range: 38 to 42 µm^[1]
Tip height: 10 to 15 µm^[1]

Configuration & options14

Model: Rtespa 300^[3]
Equipment type: Prober^[3]
Probe geometry: Rectangular^[1]
Spring constant, nominal: 40 N/m^[1]
Spring constant range: 20 to 80 N/m^[1]
Length, nominal: 125 µm^[1]
Length range: 115 to 135 µm^[1]
Front angle: 15 ± 2°^[1]
Back angle: 25 ± 2°^[1]
Side angle: 17.5 ± 2°^[1]
Cantilever material: 0.01 to 0.025 Ωcm antimony (n) doped Si^[1]
Cantilever thickness, nominal: 3.4 µm^[1]
Cantilever thickness range: 2.65 to 4.15 µm^[1]
Back side coating: Reflective aluminum^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Frequency, nominal300 kHz^[1]
Frequency range200 to 400 kHz^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the nominal spring constant of the RTESPA-300?

The nominal spring constant is 40 N/m.^[1]^[2]

What is the nominal resonance frequency of the RTESPA-300?

The nominal resonance frequency is 300 kHz.^[1]^[2]

What are the nominal and maximum tip radii of the RTESPA-300?

The nominal tip radius is 8 nm, with a maximum of 12 nm.^[1]^[2]

Does the RTESPA-300 have a reflective coating?

Yes, the backside of the cantilever has a reflective aluminum coating.^[1]^[2]

Is the RTESPA-300 mounted or unmounted?

The probe is unmounted for use on any AFM.^[1]^[2]

Not publicly documented

The following facts about the Rtespa 300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Rtespa 300 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Rtespa 300 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Rtespa 300 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Rtespa 300 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Rtespa 300 is not on record.
Answerable by: an OEM datasheet or a fab qualification report