Comparison ledger
Bruker Rtespa 300, Cascade Microtech 11000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Rtespa 300Bruker | 11000Cascade Microtech |
|---|---|---|
| OEM | Bruker | Cascade Microtech |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Bruker Rtespa 300 | Cascade Microtech 11000 |
| Specifications | ||
| Model | Rtespa 300[1] | — |
| Equipment type | Prober[1] | — |
| Probe geometry | Rectangular[2] | — |
| Frequency, nominal | 300 kHz[2] | — |
| Frequency range | 200 to 400 kHz[2] | — |
| Spring constant, nominal | 40 N/m[2] | — |
| Spring constant range | 20 to 80 N/m[2] | — |
| Length, nominal | 125 µm[2] | — |
| Length range | 115 to 135 µm[2] | — |
| Width, nominal | 40 µm[2] | — |
| Width range | 38 to 42 µm[2] | — |
| Tip radius, nominal | 8 nm[2] | — |
| Tip radius, max | 12 nm[2] | — |
| Tip height | 10 to 15 µm[2] | — |
| Front angle | 15 ± 2°[2] | — |
| Back angle | 25 ± 2°[2] | — |
| Side angle | 17.5 ± 2°[2] | — |
| Cantilever material | 0.01 to 0.025 Ωcm antimony (n) doped Si[2] | — |
| Cantilever thickness, nominal | 3.4 µm[2] | — |
| Cantilever thickness range | 2.65 to 4.15 µm[2] | — |
| Back side coating | Reflective aluminum[2] | — |
| Configuration | — | With antivibration table[3] |
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