PVA TePla 300

Models in this family

1. 

   300

   The PVA TePla 300 is a high-frequency plasma etch tool used for photoresist stripping, wafer surface cleaning, and hydrophilic surface enhancement.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   PVA TePla 300 AL (Autoload PC)	—	—	Includes autoloading system for automated wafer handling	polifab.polimi.it[1]
   PVA TEPLA 300 AL	—	—	Autoload PC version with automated wafer handling and support for wafers up to 6 inches.	polifab.polimi.it[1]

Sources