Manufacturer
PVA TePla
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2 entries
- GigaBatchPVA TePla
The Tepla GiGAbatch is a high-frequency plasma tool used for photoresist stripping, wafer surface cleaning, and descumming before wet etching.
CategoryEtchWafer75 mm to 100 mm - 300PVA TePla
The PVA TePla 300 is a high-frequency plasma etch tool used for photoresist stripping, wafer surface cleaning, and hydrophilic surface enhancement.
CategoryResist ProcessingWafer75 mm to 100 mm
