Comparison ledger
SCREEN SU 3000, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SU 3000SCREEN | 1000PYES |
|---|---|---|
| OEM | SCREEN | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | SCREEN SU 3000 | YES 1000P |
| Cited variants | — | |
| Specifications | ||
| Configuration | SR Type, SST, 3 Load Port, include HDD[1] | Parallel plate[9] |
| Wafer Size | 12 inch[1] | — |
| Type | SR Type[1] | — |
| Chemistry | DHF[2] | — |
| Load Ports | 3[1] | — |
| HDD Included | Yes[1] | — |
| Vintage (example) | 2004[1] | — |
| Process Chemistry | 2 AM 1/2 DHF[5] | — |
| Phase | 3 Phase[6] | — |
| Frequency | 60 Hz[6] | — |
| Voltage | 200 VAC[6] | — |
| Full Load | 27 kVA, 78 A[6] | — |
| Equipment type | Cleaner[1] | — |
| Vintage | 2004[1] | — |
| Model | — | 1000P[8] |
| System type | — | Plasma cleaning system[8] |
| Shelf configuration | — | Four 16 x 16 inch shelves[8] |
| Total capacity | — | 1024 square inches[8] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[8] |
| Number of shelves | — | 4[8] |
| Shelf size | — | 16 x 16 inches[8] |
| Power | — | 1000 W[9] |
| Operation modes | — | Active, RIE, Downstream[8] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[8] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →