SCREEN
SU 3000
What it is
The SCREEN / DNS SU 3000 is a semiconductor cleaner.[2]
How it works
General reference — not yet source-verifiedA wet cleaner removes process residues from wafers by exposing their surfaces to liquid chemicals and rinse steps.
A wet-processing clean tool is typically placed in a wafer handling sequence where contaminated surfaces are cleaned before later fabrication steps.
Where it fits in the process flow
Applications
The SU 3000 is used for wafer cleaning in semiconductor production.[2]
What do the numbers mean?
Power & electrical3
Wafer handling1
Gas & chemistry2
Configuration & options20
- SR Type, SST, 3 Load Port, include HDD[2]
- MP Type, DHF, 2 Load Port[3]
- MP Type, DHF, 2 Load Port, include HDD[4]
- MP Type, 2 AM 1/2 DHF, 2 Load Port, include HDD[5]
- SST[2]
- 12" SR Type, SST, 3 Load Port, include HDD[2]
- 12" MP Type, DHF, 2 Load Port[3]
- 12" MP Type, DHF, 2 Load Port, include HDD[6]
- 12" MP Type, 2 AM 1/2 DHF, 2 Load Port, include HDD[5]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| SR Type | — | 2004–2004 | Listed with SST, 3 load ports, and include HDD. | Equipment inventory listing[2] |
| MP Type | — | — | Listed with DHF and 2 load ports; some entries include HDD. | Equipment inventory listing[3] |
| SU-3100 | — | — | Mentioned alongside SU-3000 as single-wafer equipment for bevel wet etching. | patents.google.com[7] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What process role does the SU 3000 serve?
The SU 3000 serves as a cleaner in semiconductor wafer processing.[2]
Not publicly documented
The following facts about the SU 3000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SU 3000 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the SU 3000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SU 3000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SU 3000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SU 3000 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (9)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]inventory listing
- [3]inventory listing
- [4]inventory listing
- [5]inventory listing
- [6]Equipment inventory listing
- [7]patents.google.com — patents.google.compatents.google.com
- [8]Equipment inventory listing
- [9]Semiconductor Production Equipment : Product Product | Dainippon Screen Mfg. Co., Ltd. — screen.co.jp (Nov 30, 2006)web.archive.org
Last updated Oct 6, 2026.
Compare with similar tools
View all →The Glen/YES 1000FP is a plasma cleaning system designed to accept a range of shelf sizes for changing flat panel industry needs.
The 1000P is a plasma cleaning system with four 16 x 16 inch shelves and a total capacity of 1024 square inches.
The Semitool 11600 SRD is a spin rinse dryer manufactured by Semitool.