Comparison ledger
Hitachi 1305 BSG 3, SCREEN SU 3000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | SU 3000SCREEN |
|---|---|---|
| OEM | Hitachi | SCREEN |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | SCREEN SU 3000 |
| Cited variants | — | |
| Specifications | ||
| Configuration | — | SR Type, SST, 3 Load Port, include HDD[1] |
| Wafer Size | — | 12 inch[1] |
| Type | — | SR Type[1] |
| Chemistry | — | DHF[2] |
| Load Ports | — | 3[1] |
| HDD Included | — | Yes[1] |
| Vintage (example) | — | 2004[1] |
| Process Chemistry | — | 2 AM 1/2 DHF[5] |
| Phase | — | 3 Phase[6] |
| Frequency | — | 60 Hz[6] |
| Voltage | — | 200 VAC[6] |
| Full Load | — | 27 kVA, 78 A[6] |
| Equipment type | — | Cleaner[1] |
| Vintage | — | 2004[1] |
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