Waferpedia

Comparison ledger

LCD1-16NV-3versus0332 F 9453 302 Diffusion

Despatch LCD1-16NV-3, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
LCD1-16NV-3Despatch
OEMDespatchVarian
CategoryThermal / DiffusionThermal / Diffusion
Wafer size100mm—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDespatch LCD1-16NV-3Varian 0332 F 9453 302 Diffusion
Specifications
Equipment typeoven for polymer curing[1]—
Intended useOnly for biocompatible devices[1]—
Wafer carriers100mm and 150mm wafers[1]—
Piece partsallowed[1]—
Atmospherenitrogen circulation[1]—
Filterhigh efficiency particulate air filter[1]—
Temperature monitoringpossibility to monitor temperature[1]—
Maximum temperature350°C[1]—
LocationZone 11[1]—
Wafer sizes supported100mm, 150mm[1]—
Piece parts allowedYes[1]—
Nitrogen circulationYes[1]—
High efficiency particulate air filterYes[1]—
Usage restrictionBiocompatible devices only[1]—
Asset Number—142841[2]
Last Confirm Date—October 14, 2025[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.ch
  2. [2]Equipment inventory listing
  3. [3]fab-spares.comfab-spares.com