Waferpedia

Despatch

LCD1-16NV-3

The Despatch LCD1-16NV-3 is an oven for polymer curing. The Despatch LCD1-16NV-3 has a maximum temperature of 350°C. The Despatch LCD1-16NV-3 is intended only for biocompatible devices.[1]

LCD1-16NV-3 — epfl.ch
Fig. 01LCD1-16NV-3epfl.ch[2]

What it is

General reference — not yet source-verified

The Despatch LCD1-16NV-3 is an oven used in thermal and diffusion processing.

The Despatch LCD1-16NV-3 appears in a photolithography support area alongside hot plates and other ovens used for preparatory wafer handling.

How it works

General reference — not yet source-verified

An oven of this class uses controlled heat to dry, bake, or cure substrates before or after other process steps.

An oven of this class can also support vapor priming or other thermal conditioning steps when a process flow needs elevated temperature exposure.

Where it fits in the process flow

General reference — not yet source-verified

A thermal or diffusion oven fits in the front end of lithography-related processing as a preparatory or conditioning tool before coating, alignment, or exposure.

Thermal conditioning in this class is commonly paired with dehydration, adhesion promotion, or cure steps before subsequent patterning operations.

Applications

General reference — not yet source-verified

Ovens of this class are used for substrate bake, cure, and process conditioning tasks on semiconductor and microfabrication workpieces.

  • polymer curing

What do the numbers mean?

Wafer handling2

Wafer carriers
100mm and 150mm wafers[1]
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Wafer sizes supported
100mm, 150mm[1]
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Configuration & options13

Equipment type
oven for polymer curing[1]
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Intended use
Only for biocompatible devices[1]
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Piece parts
allowed[1]
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Atmosphere
nitrogen circulation[1]
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Filter
high efficiency particulate air filter[1]
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Temperature monitoring
possibility to monitor temperature[1]
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Maximum temperature
350°C[1]
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Location
Zone 11[1]
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Piece parts allowed
Yes[1]
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Nitrogen circulation
Yes[1]
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High efficiency particulate air filter
Yes[1]
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Temperature monitoring
Possible[1]
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Usage restriction
Biocompatible devices only[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Despatch LCD1-16NV-3?

It is a biocompatible oven.[3]

Where is the Despatch LCD1-16NV-3 listed in the equipment organization?

It appears under additional hot plates and ovens in the photolithography equipment area.[1][3]

Not publicly documented

The following facts about the LCD1-16NV-3 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the LCD1-16NV-3 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the LCD1-16NV-3 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the LCD1-16NV-3 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the LCD1-16NV-3 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the LCD1-16NV-3 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]epfl.ch — epfl.chepfl.ch
  2. [2]epfl.ch — epfl.chepfl.ch
  3. [3]YES 310TA, Vacuum cure & HMDS vapor prime oven ‒ Center of MicroNanoTechnology CMi ‐ EPFL — epfl.chepfl.ch
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Last updated Oct 5, 2026.

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