Sonoscan
Gen-6 alternatives
Comparable Metrology & Inspection equipment documented in the Waferpedia catalog.
6 comparable tools
Rudolph
E25
300mm
Metrology & Inspection
The Rudolph E25 System is an automated wafer edge top and edge normal inspection system for 300 mm wafers.
Onto Innovation
IVS 380 System
300mm
Metrology & Inspection
The IVS 380 System performs overlay, CD, and height metrology for 300mm wafers.
KLA
Surfscan SP 2 Particle Defect
300mm
Metrology & Inspection
The KLA Surfscan SP 2 is a particle defect inspection system for semiconductor wafers.
KLA
.204 PSL Wafer
Metrology & Inspection
The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA
.496 PSL Wafer
Metrology & Inspection
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
KLA
.498 PSL Wafer
Metrology & Inspection
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
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