Comparison ledger
Disco 321, Disco DFD 6362, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 321Disco | DFD 6362Disco |
|---|---|---|
| OEM | Disco | Disco |
| Category | Dicing & Grinding | Dicing & Grinding |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Disco 321 | Disco DFD 6362 |
| Specifications | ||
| OEM | Disco[1] | — |
| Model | 321[1] | — |
| Equipment type | Wafer Dicing Saw[1] | — |
| Facility context | Cleanroom Instrumentation[1] | — |
| Application area | Nano and Micro Fabrication[1] | — |
| Location | FNT 4.106[1] | — |
| Wafer Size | Up to 6 inches[2] | — |
| Spindle Power | 1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[3] | — |
| Spindle Power (alternate) | 1500 Watt spindle[2] | — |
| Non-Contact Setup | Non Contact Setup[3] | — |
| Microscope | Microscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[3] | — |
| Broken Blade Detection | Broken Blade Detection[3] | — |
| Light Tower | Includes Light Tower[3] | — |
| Chuck Type | 6" Universal Chuck (or 6" Porous Film Frame Chuck)[2] | — |
| Wafer size capability | Up to 6" wafers[3] | — |
| Chuck | 6-inch porous film frame chuck[2] | — |
| Spindle power | 1500-watt spindle[2] | — |
| Footprint | Small footprint[2] | — |
| Setup | Non-contact setup[3] | — |
| Blade break detection | Broken blade detection[3] | — |
| Other features | Floppy drive, light tower, blade tools, manuals[3] | — |
| Max workpiece size | — | Φ300 mm[4] |
| X-axis cutting range | — | 310 mm[4] |
| Cutting speed | — | 0.1 – 1000 mm/s[4] |
| Y1/Y2 cutting range | — | 310 mm[4] |
| Index step | — | 0.0001 mm[4] |
| Positioning accuracy (X axis) | — | Within 0.002 mm / 310 mm (Single error)[4] |
| Z-axis max stroke | — | 14.7 mm (for Φ2 inch blade); 14.9 mm (for Φ3 inch blade)[4] |
| θ-axis max rotating angle | — | 380 deg[4] |
| Spindle rated torque (1.2 kW / high-speed rotation) | — | 0.19 N·m[4] |
| Spindle rotation speed range (1.2 kW / 1.8 kW) | — | 6,000 – 60,000 min⁻¹[4] |
| Spindle rotation speed range (high-speed rotation) | — | 20,000 – 80,000 min⁻¹[4] |
| Equipment dimensions (W×D×H) | — | 1,200 × 1,550 × 1,800 mm[4] |
| Equipment weight | — | Approx. 2,050 kg[4] |
| Power supply phase | — | 3 Phase[5] |
| Power frequency | — | 50/60 Hz[5] |
| Voltage range | — | 308 – 415 VAC ±10%, 3 Phase[5] |
| Full load current | — | 9 A[5] |
| Machine main breaker rating | — | 20 A[5] |
| Standard spindle power | — | 1.2 kW[6] |
| Optional spindle powers | — | 1.8 kW or 2.2 kW[6] |
| Wafer size | — | 300 mm[6] |
| Vintage | — | 2010[6] |
| Serial number | — | NL1049[6] |
| Cassette type | — | Dual-stack cassette handler for 300 mm[6] |
| BCR system | — | Yes[6] |
| Touch screen display | — | Yes[6] |
| Automatic wheel covers | — | Yes[6] |
| Air ionizer | — | Yes[6] |
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