Comparison ledger
Bruker Dimension 3100, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Dimension 3100Bruker | |
|---|---|---|
| OEM | Bruker | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Bruker Dimension | KLA .496 PSL Wafer |
| Specifications | ||
| Configuration | Nanoscope IV Controller[1] | NIST Traceable[3] |
| Temperature | 2 Non-magnetic Heater / Cooler Stages (-35° to +100°C[2] | — |
| Wafer Size | 8 inch[1] | — |
| Controller | Nanoscope IV[1] | — |
| Vintage | 2002[1] | — |
| Control Software | NanoScope V 6.13[2] | — |
| Analysis Software | NanoScope Analysis V 1.5[2] | — |
| Monitors | Dual 22" Dell Flatscreen Monitors[2] | — |
| Vibration Isolation | TMC Gimbal Piston Pneumatic Vibration Isolation Table with Acoustic Enclosure[2] | — |
| AFM Heads | Standard open-loop XYZ, closed-loop XY/open-loop Z, hybrid closed-loop XYZ[2] | — |
| Application Modules | CAFM and Extended TUNA[2] | — |
| Thermal Applications Controller | TAC[2] | — |
| Heater/Cooler Stages | Two non-magnetic stages, -35° to +100°C[2] | — |
| OEM | Bruker / Veeco[1] | — |
| Model | Dimension 3100[1] | — |
| Tool type | AFM (Atomic Force Microscope)[1] | — |
| Wafer sizes | 8 inch[1] | — |
| Wafer size | — | 8 inch[3] |
| Traceability | — | NIST Traceable[3] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[3] |
| Category | — | Metrology & Inspection[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →