Comparison ledger
Axcelis GSD 200 E 2 High Current, Varian Viision 200 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | GSD 200 E 2 High CurrentAxcelis | Viision 200 IonVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis GSD 200 | Varian Viision 200 |
| Cited variants |
| — |
| Specifications | ||
| Software Version | VM 8.0 (Virtual Machine)[1] | — |
| CIM | SECs[1] | — |
| Process | B11, BF2, As, P[1] | — |
| Handler System | Arm (Non HPES), In Air Handler[1] | — |
| Factory Interface | None[1] | — |
| Option System | Silicon Disk, SEF EGUN[1] | — |
| Configuration | Blade Server 120006095C Excluded[1] | Gasbox:[4] |
| Process Species | B11, BF2, As, P[1] | — |
| Vintage | 2001[1] | 1997[4] |
| Disk Drive | Direct-Drive[2] | — |
| Dose Type | Regular[2] | — |
| Source Type | ELS4 IHC-Source without Vaporizer[2] | Bernas Source[4] |
| Main Workstation | SUN Solaris AXI 3HE (special case)[2] | — |
| Second Workstation | SUN Sparc5 on cart with printer[2] | — |
| CIM Interface | SECs[1] | — |
| Wafer Size | 8 inch[1] | — |
| High Voltage Transformer | both Oil/Light[2] | — |
| Tower Color | red/yellow/green; no buzzer[2] | — |
| Network | 24-port 100MB Ethernet with Cisco Router[2] | — |
| Kit Cell Controller | 177[2] | — |
| Options | Accel-Highvoltage Probe installed, HPES-Upgrade installed[2] | — |
| Implant Disc | — | 13 Site, Silicon Coated[4] |
| CE-Mark | — | Yes[4] |
| Average Time | — | 85%[4] |
| Computer System | — | 147 MHz Main & ES CPU[4] |
| Cleanroom Monitor | — | TFT[4] |
| Remote Service Monitor | — | Not Included[4] |
| String #1 - SDS | — | MKS P 2 A (calibrated for 10 sccm phosporus)[4] |
| PFG | — | Unit 8160 (configured for 5 sccm Xe)[4] |
| Wafer Sizes | — | 8 inch[4] |
| Source Chamber Beam Kit | — | Included[4] |
| Source Turbo | — | Pfeiffer HiPace 1500C[4] |
| Beamline Turbo | — | Pfeiffer TPH 1201 U P[4] |
| Endstation Manifold Turbo Pump | — | Pfeiffer HiPace 300[4] |
| Cryo Compressor | — | 2x CTI 9600[4] |
| Cryo Pump | — | 4x CTI 250F[4] |
| Frequency Kit | — | 50 Hz[4] |
| Gasbox String 1 SDS | — | MKS P 2 A (calibrated for 10 sccm phosphorus)[4] |
| Gasbox String 2 SDS Unit | — | 1662 (calibrated for 10 sccm Arsine)[4] |
| Gasbox String 3 HP | — | calibrated for 10 sccm BF3[4] |
| Gasbox String 4 | — | Tylan FC 2900 (10 sccm Argon)[4] |
| New Infranor Amplifier | — | Xtra Puls[4] |
| Spin Amp | — | Kollmorgen Servo Star S 700[4] |
| Terminal Differential Pump | — | Membran Pump[4] |
| Endstation Differential Pump | — | Membran or Scroll Pump[4] |
| Voltage | — | 208 V[5] |
| Phase | — | 3 Phase[5] |
| Connection | — | Top[5] |
| Source | — | I.H.C (2nd Source Solutions, IBS Extencsy Source)[5] |
| String #2 - SDS | — | MKS-P2A: 10 sccm[5] |
| String #3 - HP | — | Unit UFC-8100: 10 sccm[5] |
| String #4 - HP | — | Tylan FC-2900MEP: 5 sccm[5] |
| Computer | — | 147 MHz & ES CPU[5] |
| Software | — | Ver. 6.24 (renewal of license from AMAT required)[5] |
| Remote Monitor | — | TFT (IFX Homemade Solutions)[5] |
| Terminal Differential Seal | — | Menbran[5] |
| Cryo Comp 1 | — | 9600 LV[5] |
| Cryo Comp 2 | — | 9600 LV[5] |
| Frequency | — | 50 hz Frequency Converter[5] |
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