Waferpedia

Comparison ledger

200 PCUversusNH 20 SP Medium Current Ion

Axcelis 200 PCU, Nissin NH 20 SP Medium Current Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
200 PCUAxcelis
OEMAxcelisNissin
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones2000 Vintage—
Control system——
Generation——
FamilyAxcelis NV GSD 200Nissin NH 20 SP Medium Current Ion
Cited variants
  • Fusion 200 PCU[1]
  • Fusion 200 PCU-P[2]
—
Specifications
P/NSC 4840 A[3]—
Frequency50 Hz[3]—
Phase3 Phase[3]—
Voltage400 V[3]—
Asset #—75435[4]
Make—Nissin[4]
Model—NH 20 SP[4]
Wafer Size—8 inch[4]
Last Confirm Date—December 06, 2023[4]
Vintage—1996[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]exapro.comexapro.com
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]inventory listing
  4. [4]Equipment inventory listing