Comparison ledger
Applied Materials VIISta HCS Ion, Axcelis 200 PCU, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | VIISta HCS IonApplied Materials | 200 PCUAxcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2000 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials VIISTA | Axcelis NV GSD 200 |
| Cited variants | — | |
| Specifications | ||
| Configuration | 1 channel[3] | — |
| Channels | 1[3] | — |
| Gas flow type | SCCM type[3] | — |
| Gas lines | 6[3] | — |
| Vintage | 2010[3] | — |
| P/N | — | SC 4840 A[4] |
| Frequency | — | 50 Hz[4] |
| Phase | — | 3 Phase[4] |
| Voltage | — | 400 V[4] |
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