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0041-26723 Bonded Assemblyversus40 NT

Applied Materials 0041-26723 Bonded Assembly, EV Group 40 NT, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
40 NTEV Group
OEMApplied MaterialsEV Group
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0041-26723 Bonded AssemblyEV Group 40
Specifications
Configuration—50/60 Hz[1]
Voltage—230 V[1]
Product type—Automated Measurement System[2]
Tool format—stand-alone tool[2]
Integrated module—AVM (HVM-integrated module)[2]
Measurement scope—lithography-relevant parameters and bond alignment accuracy[2]
Measurement methods—critical dimension measurement, die-to-die alignment verification, multi-layer thickness measurement[2]
Application examples—nanoimprint lithography and wafer-to-wafer bonding[2]
Verification capability—100 nm bond overlay accuracy of EVG's GEMINI FB automated fusion bonding system[2]
Microscope configuration—top- to bottom-side microscope[2]
Software—PC-based measurement and pattern recognition software[2]
Throughput support—specialized calibration routine[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]evgroup.comevgroup.com