Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research 2300 Kiyo EX, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | 2300 Kiyo EXLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research 2300 |
| Specifications | ||
| OEM | Applied Materials[1] | Lam Research[3] |
| Model | 0010-16392[1] | 2300 Kiyo EX[3] |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | 300mm[4] |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | Polysilicon[3] |
| Description | — | Polysilicon Etch[4] |
| Equipment type | — | Etch/Ash/Clean - Plasma Processing Equipment[4] |
| Currently configured for | — | 300 mm[4] |
| Tool model | — | KIYOEX[4] |
| System power rating | — | 208 AC 3-Phase[4] |
| Loading configuration | — | 3 Load ports[4] |
| Chambers | — | Chamber 1, Chamber 2, Chamber 3[4] |
| Chamber descriptions | — | KIYOEX, KIYOEX, KIYOEX[4] |
| Process Type | — | Polysilicon Etch[4] |
| Load Ports | — | 3[4] |
| Chamber Type | — | KIYOEX[4] |
| N2 Load Port Vendor | — | JUSTEM[4] |
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