Zygo

Plate 01Overview of ZYGO Nexview™ NX2 Non-Contact Optical Profiling System
Plate 02ZYGO Nexview™ NX2 Non-Contact Optical Profiling System - 3D Optical Profiler
The Zygo Nexview NX 2 is manufactured by Zygo. The system supports objectives from 1.0X to 100X magnification, available in standard and long working distance versions. The motorized part stage offers XY travel options of 200 mm or 200 x 325 mm, with ±4° tilt. The vertical scan range is 150 μm with a precision piezo drive and 20 mm with extended scan. Surface topography repeatability is 0.06 nm, and RMS repeatability is 0.005 nm. Optical lateral resolution is 0.34 μm with the 100X objective, and spatial sampling is 0.04 μm with the 100X objective and 2X zoom.[2][1]
The Nexview NX 2 uses a proprietary solid-state white light illuminator with software-selectable field stop, aperture stop, and spectral filters. The measurement array is selectable among 1600 x 1200, 1000 x 1000, 1000 x 600, and 1000 x 200 pixels. The Z-drive (focus) stage has a 100 mm range with 0.1 μm resolution. Part viewing includes selectable monochrome and color imaging with a fringe-free viewing mode. The system controller is an i7 class PC running ZYGO Mx software under Microsoft Windows 10 (64-bit). Optical zoom is motorized with three encoded positions: 0.5X, 1.0X, and 2.0X included, with 0.75X and 1.5X optional. Objective mounting options include a single objective dovetail, a manual encoded four-position turret, and a motorized four-position turret.[2][1]
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The vertical scan range is 150 μ m with precision piezo drive and 20 mm with extended scan.[2][1]
Objectives from 1.0X to 100X magnification are supported, in standard and long working distance versions.[2][1]
The following facts about the Nexview NX 2 Optical Surface are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Nexview NX 2 Optical Surface are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Nexview NX 2 Optical Surface are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Nexview NX 2 Optical Surface are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Nexview NX 2 Optical Surface are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Nexview NX 2 Optical Surface is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 11, 2026.
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