Zeiss

LEO 1560

Metrology & Inspection 6” wafer loading through the loadlock is possible Zeiss LEO family

Research Quality: 50% complete

The Zeiss LEO 1560 is a scanning electron microscope (SEM) with a Schottky field emission gun and an in-lens secondary electron detector. The LEO 1560 achieves up to 1 nm resolution at 20 kV accelerating voltage. The LEO 1560 supports 6-inch wafer loading through its loadlock.^[1]

LEO 1560 — Inventory photo — Fig. 01LEO 1560Inventory photo^[1]

Plate 01Used ZEISS scanning electron microscope LEO 1560
SDL Industrial ClubWatch on YouTube

Wafer size

6” wafer loading through the loadlock is possible

Power

200 V to 30 kV^[3]

Optics

In-lens SE & E-T SE detectors^[1]

What it is

The Zeiss LEO 1560 is a scanning electron microscope used for metrology and inspection. The model is a field emission SEM.^[1]^[2]^[3]^[4]

How it works

General reference — not yet source-verified

A scanning electron microscope forms images by scanning a focused electron beam across a specimen and collecting emitted signals from the surface. A field emission SEM uses an electron source that supports fine probing and high beam brightness for imaging small features.

Where it fits in the process flow

General reference — not yet source-verified

The Zeiss LEO 1560 fits in inspection and metrology operations where detailed surface imaging is needed before or after later process steps. The model is used on wafers and samples rather than for wafer fabrication itself.

Why won't it start?

Documented failure modes, common issues, and field considerations.

Some flickering on image of chamber scope

What do the numbers mean?

Power & electrical1

Accelerating voltage: 200 V to 30 kV^[3]

Wafer handling13

6" stage and loadlock^[1]
Wafer size: 6” wafer loading through the loadlock is possible^[1]; Field 6” loadlock and stage^[1]
Wafer size: 4" max wafer diameter loading with the load lock^[1]
Wafer size: Comes with a variety of sample and wafer holders^[1]
Wafer size: 6" stage and loadlock. 6” wafer loading thru the loadlock is possible^[2]; Fjeld 6” loadlock and stage^[2]
Wafer size: 4" max wafer diameter loading with the load lock, 6'' max loading through the chamber door^[2]
Wafer size: Includes a variety of sample and wafer holders^[2]
Maximum wafer loading: 4 inch via loadlock, 6 inch via chamber door^[1]
Airlock: Integrated 8-inch airlock / 6-inch loadlock^[3]
Max Wafer Diameter (loadlock): 4 inch^[1]
Max Wafer Diameter (chamber door): 6 inch^[1]

Optics & imaging7

In-lens SE & E-T SE detectors^[1]; Capable of 1nm resolution at 20kV^[1]
Resolution: 1 nm at 20 kV^[1]
Detectors: In-lens SE and E-T SE detectors^[1]
Detector (BSE): Robinson backscattered electron detector^[3]
Detectors: In-lens SE & E-T SE detectors^[1]
Resolution at 20kV: 1nm^[1]

Control & software4

Upgraded with integrated Current monitor on stage, readable in software^[1]
Operating system: Windows 11^[3]
Software: Runs SmartSEM v5^[1]
Control Software (if upgraded): SEMView8000^[4]

Configuration & options11

Schottky field emission gun^[1]; 6'' max loading through the chamber door^[1]; Upgraded to uniplinth^[1]; Runs Smartsem v5^[1]; Some Flickering on image of chamberscope^[1]; Upgraded to uniplinth. Runs Smartsem v5^[2]
Known issues: Some Flickering on image of chamber scope^[2]
Electron source: Schottky field emission gun^[1]
Stage: Fully motorized 6-axis eucentric stage^[3]
Airlock: Integrated 8-inch airlock^[3]
Current monitor: Integrated current monitor on stage^[1]

Interested in this tool?

Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Accelerating voltage200 V to 30 kV^[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What resolution does the LEO 1560 achieve?

The LEO 1560 achieves a resolution of 1 nanometer at 20 kilovolts.^[1]^[2]^[3]

What electron source does the LEO 1560 use?

The LEO 1560 uses a field emission gun, specifically a Schottky thermal field emission source, providing a bright and stable electron beam.^[1]^[2]^[3]

What wafer sizes can the LEO 1560 handle?

The LEO 1560 can load 6-inch wafers through the loadlock. Maximum wafer diameter loading with the load lock is 4 inches, and loading through the chamber door accommodates up to 6-inch wafers.^[1]^[2]

What detectors are standard on the LEO 1560?

The LEO 1560 includes an in-lens secondary electron detector, an Everhart-Thornley secondary electron detector, and a Robinson backscattered electron detector.^[1]^[2]^[3]

What is the accelerating voltage range of the LEO 1560?

The LEO 1560 operates across an accelerating voltage range of 200 volts to 30 kilovolts.^[3]^[4]

Can the LEO 1560 perform elemental analysis?

Yes, the LEO 1560 can be equipped with an energy-dispersive X-ray spectroscopy (EDS) detector for elemental analysis and mapping.^[3]^[4]

Not publicly documented

The following facts about the LEO 1560 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the LEO 1560 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the LEO 1560 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the LEO 1560 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the LEO 1560 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the LEO 1560 are on record.
Answerable by: an OEM parts catalog or a service engineer