Waferpedia

Yaskawa

XU RC 7220 Atmospheric Wafer Robot

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Yaskawa XU RC 7220 is an atmospheric wafer robot. The XU RC 7220 is compatible with 12-inch wafers. The XU RC 7220 is compatible with Applied Materials (AMAT) equipment.[1][2]

YaskawaXU RC 7220 Atmospheric Wafer Robot
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What it is

The Yaskawa XU RC 7220 is an atmospheric wafer robot.[1][2][3]

The XU RC 7220 is compatible with Applied Materials (AMAT) equipment.[1][2]

What do the numbers mean?

Wafer handling2

Equipment type
Atmospheric Wafer Robot[2]
Accurate?
Wafer size compatibility
12 inch[1]
Accurate?

Configuration & options5

Compatible with AMAT[1]
Accurate?
OEM
Yaskawa[2]
Accurate?
Model
XU RC 7220[2]
Accurate?
Compatibility
Compatible with AMAT[1]
Accurate?
Compatibility
AMAT (Applied Materials)[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the XU RC 7220 Atmospheric Wafer Robot are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the XU RC 7220 Atmospheric Wafer Robot are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the XU RC 7220 Atmospheric Wafer Robot are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the XU RC 7220 Atmospheric Wafer Robot are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the XU RC 7220 Atmospheric Wafer Robot are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the XU RC 7220 Atmospheric Wafer Robot is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]Yaskawa XU RC 7220 Atmospheric Wafer Robot family | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 11, 2026.

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