Wyko
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The TOPO-3D is a non-contact interferometric surface profilometer developed by Wyko Corporation. The TOPO-3D uses white light interferometry to measure surface topography with sub-nanometer vertical resolution. The TOPO-3D can also utilize phase-shifting interferometry for 3D surface mapping and includes a Phase Measurement Interface controller.[1][2][3]
Plate 01Wyko TOPO 3D Profiler #54371
The Wyko TOPO-3D is an interferometric surface profiler developed by Wyko Corporation, which was later acquired by Veeco Instruments. The instrument is a non-contact optical profilometer that measures surface topography without physically touching the sample. The TOPO-3D uses either white light interferometry or phase-shifting interferometry (PSI) to generate detailed surface maps. The system provides sub-nanometer vertical resolution. The profiler includes a binocular eyepiece assembly, a motorized optical head, and an adjustable sample stage. A separate Phase Measurement Interface (PMI) controller unit is part of the system. The instrument can be used with interchangeable Mirau interferometric objectives of different magnifications, including PX1.5, PX5, PX20, and PX40.[2][3]
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The TOPO-3D uses white light interferometry and phase-shifting interferometry (PSI) to measure surface topography.[2][3]
The instrument provides sub-nanometer vertical resolution.[2][3]
The TOPO-3D was developed by Wyko Corporation, which was later acquired by Veeco Instruments.[2][3]
The system includes the profiler head, a Phase Measurement Interface (PMI) controller unit, and a set of interferometric objectives.[3]
The following facts about the TOPO-3D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TOPO-3D are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the TOPO-3D are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the TOPO-3D are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TOPO-3D are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TOPO-3D is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Sep 22, 2026.