Veeco
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The Veeco K 465 GaN MOCVD is a metal organic chemical vapor deposition system for GaN. The K 465 GaN MOCVD uses a K465 GaN Turbo disk. The K 465 GaN MOCVD operates on a 3 phase, 5 wire, 380 Vac, 280 A, 50/60 Hz power supply.[1][2]

The Veeco K 465 is a GaN MOCVD system for metal organic chemical vapor deposition.[1]
A metal organic chemical vapor deposition system delivers reactive precursor gases into a process chamber and forms thin semiconductor films on a heated substrate by chemical reaction at the surface.
A GaN MOCVD tool is used to grow gallium nitride epitaxial layers with controlled composition and thickness for device structures.
A metal organic chemical vapor deposition system sits in the epitaxial growth stage of compound semiconductor fabrication.
GaN epitaxy supports compound semiconductor device fabrication for electronic and optoelectronic structures.
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The following facts about the K 465 GaN MOCVD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the K 465 GaN MOCVD are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the K 465 GaN MOCVD are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the K 465 GaN MOCVD are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the K 465 GaN MOCVD are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the K 465 GaN MOCVD is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 8, 2026.
The Applied Materials 0010-13622 is an RF match unit intended for PVD (Physical Vapor Deposition) described as a High Efficiency HE RF Match-Bias.
The Applied Materials 0020 12458 Part is an insulator, side match component for the Hdp-Cvd Ultima Plus system.