Waferpedia

Tokyo Electron

19 S

Test & ProbeTokyo Electron 19 S family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Tokyo Electron 19 S is a prober. The Tokyo Electron 19 S supports 3-inch to 6-inch wafers. The Tokyo Electron 19 S has inking capabilities.[1]

19 S — Inventory photo
Fig. 0119 SInventory photo[1]

What it is

The Tokyo Electron 19 S is a probe equipment model used for wafer probing and inking capability. The model supports wafer sizes from 3 inch to 6 inch.[1]

How it works

General reference — not yet source-verified

A prober presents a wafer on a precision stage and brings probe needles or probe cards into contact with selected sites. The machine allows electrical testing of dies or structures across the wafer surface.

Inking capability supports marking or sorting-related handling after test. The equipment class uses controlled wafer motion and fine positioning to reach test locations repeatably.

Where it fits in the process flow

General reference — not yet source-verified

The Tokyo Electron 19 S fits in wafer-level test operations after patterning and before final assembly. The machine supports probing of devices or test structures on wafers in a process flow that needs site-by-site electrical verification.

What do the numbers mean?

Wafer handling1

Wafer sizes
3, 4, 5, 6 inch[1]
Accurate?

Configuration & options5

Inking Capabilities[1]
Accurate?
OEM
Tokyo Electron[1]
Accurate?
Model
19 S[1]
Accurate?
Equipment type
Prober[1]
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Capability
Inking capabilities[1]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Tokyo Electron 19 S?

It is a prober.[1]

Not publicly documented

The following facts about the 19 S are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 19 S are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 19 S are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 19 S are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 19 S are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 19 S is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Oct 5, 2026.

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