Thermo Fisher
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The ThermoFlex900 is a Thermo Fisher recirculating chiller. The ThermoFlex900 uses the ThermoFlex recirculating chillers (Basic Controller) product line. The ThermoFlex900 is designed to provide a continuous supply of fluid at a constant temperature and volume.[1][2][3][4]
Plate 01Thermo Fisher Neslab ThermoFlex 900 SID Recirculating Chiller
Plate 02Neslab ThermoFlex900 Recirculating Chiller
Recirculating chillers are fluid temperature control systems that supply a continuous stream of coolant at a set temperature to external process equipment. The ThermoFlex900 is a model in the ThermoFlex line of recirculating chillers manufactured by Thermo Fisher Scientific.
A recirculating chiller operates by means of a vapor-compression refrigeration cycle. A compressr compresses refrigernt gas, which then condenses in a condensr, relieasing heat. The liquid refrigernt expands through an expansion valve, cooling the evaporator coil. The evaporator absorbs heat from the process fluid as it circulates through the chiller's reservoir and heat exchanger. A pump forces the chilled fluid through an external loop to the process tool and back to the reservoir. The chiller continuously monitors the fluid temperature via a temperature sensor and modulates the refrigeration system to maintain the setpoint.
Documented failure modes, common issues, and field considerations.
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| ThermoFlex900/1400 | — | — | — | waferpedia.com[4] |
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Approved fluids include filtered/single distilled water (pH 7–8), deionized water (1–10 MΩ·cm, compensated), distilled water with Nalco biocide and inhibitor, distilled water with chlorine (5 ppm), and 0–75% laboratory grade ethylene glycol/water or propylene glycol/water mixtures.[2]
The following facts about the ThermoFlex900 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ThermoFlex900 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the ThermoFlex900 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the ThermoFlex900 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the ThermoFlex900 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the ThermoFlex900 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Last updated Oct 11, 2026.