Tegal
T915
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Tegal T915 is a resist asher for wafer processing. The source explicitly lists the tool as "TEGAL T915 RES-ASHER" in a parts inventory. The T915 uses modular PCBs such as the "ATI-3 AUTO TUNE" board and other subassemblies common to the Tegal 900 series etcher/asher platform.[1]
What it is
General reference — not yet source-verifiedThe Tegal T915 is a plasma etcher/asher manufactured by Tegal Corporation. Plasma etchers are used in semiconductor fabrication to remove material from wafer surfaces through reactive ion etching or plasma ashing processes.
How it works
General reference — not yet source-verifiedPlasma etchers and ashers generate a low-pressure plasma by applying radio-frequency (RF) power to a process gas. The energized gas species chemically react with or physically bombard the wafer surface, removing material selectively. The T915, as a member of this class, uses controlled gas flows, RF matching networks, and endpoint detection to achieve reproducible etch or ash results.
Where it fits in the process flow
General reference — not yet source-verifiedIn a semiconductor fab, plasma etching typically follows photolithography to transfer circuit patterns into underlying layers. Ashing is used to remove photoresist masks after etching or ion implantation. The T915 would be positioned in the etch or ash module area, handling wafers after lithography and before subsequent cleaning or deposition steps.
Applications
General reference — not yet source-verifiedThe Tegal T915 can be used for etching dielectric films, silicon, or metal layers, as well as for stripping photoresist in an oxygen-based plasma. Such systems are employed in front-end-of-line and back-end-of-line processing for integrated circuits and other semiconductor devices.
- Resist ashing
What do the numbers mean?
Gas & chemistry1
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- CategoryResist Asher[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the T915 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the T915 are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the T915 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the T915 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the T915 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the T915 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]semistarcorp.com — semistarcorp.comsemistarcorp.com
Last updated Oct 3, 2026.
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