Rorze
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The Rorze RR 700 L 150 Z 30 is a single-arm robot. The Rorze RR 700 L 150 Z 30 is compatible with the AMAT Mirra Mesa CMP system. The Rorze RR 700 L 150 Z 30 handles 6-inch wafers.[1][2][3]
A CMP robot moves wafers between a carrier interface and the polisher input and output stations.
A dry robot used in CMP handling transfers wafers into the polishing tool and then removes them for later handling steps.
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| RR700L150-Z30-01 | — | — | 200mm wafer size | tarasemi.com[2] |
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The following facts about the RR 700 L 150 Z 30 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RR 700 L 150 Z 30 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the RR 700 L 150 Z 30 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the RR 700 L 150 Z 30 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the RR 700 L 150 Z 30 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the RR 700 L 150 Z 30 are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Oct 8, 2026.
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