Oxford Instruments
Plasmalab 100 ICP 180 RIE
Plate 01Video 1 Oxford Plasmalab 100 ICP System ID# 3589
TechnolutionsWatch on YouTubePlate 02Oxford Plasmalab 100 ICP (ID# 4162)
ClassOneEngineeringWatch on YouTubePlate 03Oxford Plasmalab 100 ICP Etcher (ID# 3811)
ClassOneEngineeringWatch on YouTubePlate 04Oxford Plasmalab 100 ICP (ID# 3894)
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What it is
The specific model is configured to process six-inch wafers and operates on a 208V, 50/60Hz electrical supply. The system includes a VAT PM-5 adaptive pressure controller, an Adixen ACT 1300M turbopump controller, a Leybold D65BCS vacuum pump, a gas box, two chillers (Thermo Neslab and OptiTemp OTI-5WL-P3-216), a control computer (without a hard disk drive), an LCD monitor, and a computer cart.[1][2]
How it works
The Plasmalab 100 ICP 180 RIE incorporates a VAT PM-5 adaptive pressure controller for precise regulation of process chamber pressure. Vacuum is maintained by an Adixen ACT 1300M turbopump controller backed by a Leybold D65BCS vacuum pump. Process gases are delivered through an integrated gas box.[1][2]
Where it fits in the process flow
General reference — not yet source-verifiedReactive ion etchers are typically placed in a semiconductor fab after the lithography step, where they transfer photoresist patterns into underlying layers of material. The etched features are then followed by resist stripping, inspection, and subsequent deposition or processing steps.
Applications
What do the numbers mean?
Power & electrical2
Vacuum & pumping6
Wafer handling1
Gas & chemistry2
- Gas Box[1]
Control & software4
Configuration & options11
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Voltage208V, 50/60Hz[1]
- ConfigurationWith VAT PM-5 Adaptive Pressure Controller[1]
- ConfigurationAdixen ACT 1300M Turbopump Controller[1]
- ConfigurationLeybold D65BCS Vacuum Pump with Oil Filter & Exhaust Filter[1]
- ConfigurationGas Box[1]
- Power208V, 50/60Hz[1]
- Adaptive pressure controllerVAT PM-5[1]
- Turbopump controllerAdixen ACT 1300M[1]
- Vacuum pumpLeybold D65BCS with oil filter and exhaust filter[1]
- Gas deliveryGas Box[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Does the system include a chiller?
Yes, it includes a Thermo Neslab chiller and an OptiTemp OTI-5WL-P3-216 chiller.[1][2]
What vacuum components are included?
The system includes an Adixen ACT 1300M turbopump controller and a Leybold D65BCS vacuum pump with oil filter and exhaust filter.[1][2]
Not publicly documented
The following facts about the Plasmalab 100 ICP 180 RIE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Plasmalab 100 ICP 180 RIE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Plasmalab 100 ICP 180 RIE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Plasmalab 100 ICP 180 RIE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Plasmalab 100 ICP 180 RIE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Plasmalab 100 ICP 180 RIE is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
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